Shenzhen Sunrise Metal Industry Co.,Ltd offer tantalum niobium alloys : PRODUCT INFORMATION TANTALUM SPUTTERING TARGETS Shenzhen Sunrise Metal Industry Co.,Ltd

PRODUCT INFORMATION TANTALUM SPUTTERING TARGETS Shenzhen Sunrise Metal Industry Co.,Ltd

TEL：0086-0755-27185042
Website：http://www.sunriseta.com
E-Mail：sales@sunriseta.com

TANTALUM SPUTTERING TARGETS

Shenzhen Sunrise Metal Industry Co.,Ltd is well-known as a major international producer of tantalum products for the electronic, semiconductor and industrial markets.

Tantalum ingots are electron beam (EB) melted, and have inherently high purity due to a combination of high vacuum settings, slow melting rates, multiple furnace passes, and careful control of all aspects of the process.

Tantalum Sputtering Target

Application

Tantalum targets make thin coatings via a sputtering process on magnetic recording media, printer components, flat panel displays, optical and industrial glass, and thin film resistors. Tantalum is similar to glass in its extreme corrosion resistance and has extensive uses in protection against hot concentrated acids.

Dimensions

Shenzhen Sunrise Metal Industry Co.,Ltd supplies both blanks and finished tantalum plates to manufacturers of sputtering targets. These targets meet exacting standards of purity and dimensional tolerances. (Bonding is not done in-house.) Sizes range from small research cathodes to large 100 pound planar targets. Typical thicknesses include .2" to .47", but thickness can be up to 1.5" and greater. Typical diameters are 3" to 12". Typical rectangles are 6" to 30" or larger based on customer needs.

TYPICAL TANTALUM PROPERTIES

Cross rolled, electron beam (EB) melted, rolled and annealed:

Density: 0.6 lb/in3 or 16.6 g/cm3
Atomic Number: 73
Atomic Weight: 180.95
Purity: See chemistries below:

Elements	3N5 Purity 99.95% Ta	3N8 Purity 99.98% Ta
	Max. ppm	Max. ppm
Al	10	5
Ca	10	5
Cl	3	3
Co	10	5
Cr	10	5
Cu	5	5
Fe	50	20
K	2	2
Li	1	1
Mg	10	5
Mn	10	5
Mo	50	20
Na	1	1
Nb	300	100
Ni	20	10
Pb	5	5
Si	10	10
Sn	10	5
Ti	10	5
V	5	5
W	150	100
Zn	5	5
Zr	20	10
Max Total Detectable Metallics	500	200

INTERSTITIALS
C	40	40
O	100	100
H	10	10
N	40	20
S	10	10

TOLERANCES

Thickness:
Rolled and leveled plates have a normal thickness tolerance of ±5% which can be tightened to ±.010" at an added cost, depending on dimensions required.

Flatness:
.005"-.010" TIR, depending on size and thickness.

Grain Size:
ASTM 4 or finer for targets made from plates under .4" thick.

HIGH PURITY TANTALUM CHEMISTRIES

There is a choice of purity levels with different prices and availability. Purity is measured by DC Plasma and gasses are measured by Leco analyzers. More detailed testing by GDMS (Glow Discharge Mass Spectrometry) is available.